Hofmann, MichaelMichaelHofmannSchenk, TonyTonySchenkKulemanov, IvanIvanKulemanovAdelmann, ChristophChristophAdelmannPopovici, Mihaela IoanaMihaela IoanaPopoviciSchroeder, UweUweSchroederMikolajick, ThomasThomasMikolajick2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23951Low temperature compatible hafnium oxide based ferroelectricsProceedings paper