First evaluation of new advanced SOG 2.0 low-k material

Smirnov, EvgenyEvgenySmirnovVanstreels, KrisKrisVanstreelsVerdonck, PatrickPatrickVerdonckShamiryan, DenisDenisShamiryanBaklanov, MikhaïlMikhaïlBaklanovPhillips, MarkMarkPhillips2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18003First evaluation of new advanced SOG 2.0 low-k materialMeeting abstract