Local doping profiles for height-selective emitters determined by Scanning Spreading Resistance Microscopy (SSRM)

Ferrada, PabloPabloFerradaHarney, R.R.HarneyWefringhaus, E.E.WefringhausDoering, S.S.DoeringJakschick, S.S.JakschickMikolajick, T.T.MikolajickEyben, PierrePierreEybenHantschel, ThomasThomasHantschelVandervorst, WilfriedWilfriedVandervorstWeiss, M.M.WeissLossen, J.J.Lossen2021-10-212021-10-2120132156-3381https://imec-publications.be/handle/20.500.12860/22338Local doping profiles for height-selective emitters determined by Scanning Spreading Resistance Microscopy (SSRM)Journal article