Deng, QingzhongQingzhongDengArisev, OngunOngunArisevKouznetsov, DmitryDmitryKouznetsovHasan, MahmudulMahmudulHasanNeutens, PieterPieterNeutensLuo, ZhenxiangZhenxiangLuoHa, SeungkyuSeungkyuHaCovens, KrisKrisCovensVos, RitaRitaVosVan Dorpe, PolPolVan DorpeVerellen, NielsNielsVerellen2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/35032Proceedings paperhttps://doi.org/10.1117/12.2557750