BEFORCE: a pathway to unravel metal oxide resist (MOR) reactions upon EUV exposure, bake, and environment

Pollentier, IvanIvanPollentierHolzmeier, FabianFabianHolzmeierDorney, KevinKevinDorneySuh, Hyo SeonHyo SeonSuh2025-07-072025-05-112025-07-072024978-1-5106-8155-20277-786XWOS:001467876500015https://imec-publications.be/handle/20.500.12860/45644BEFORCE: a pathway to unravel metal oxide resist (MOR) reactions upon EUV exposure, bake, and environmentProceedings paper10.1117/12.3034708978-1-5106-8156-9WOS:001467876500015