On the physics of stiction and its impact on the reliability of microstructures

van Spengen, MerlijnMerlijnvan SpengenPuers, BobBobPuersDe Wolf, IngridIngridDe Wolf2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8299On the physics of stiction and its impact on the reliability of microstructuresJournal article