Naito, YasuyukiYasuyukiNaitoHelin, PhilippePhilippeHelinNakamura, K.K.NakamuraDe Coster, JeroenJeroenDe CosterGuo, BinBinGuoHaspeslagh, LucLucHaspeslaghOnishi, K.K.OnishiTilmans, HarrieHarrieTilmans2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17681High-Q torsional mode Si triangular beam resonators encapsulated using SiGe thin filmProceedings paper