Comparison of two-dimensional carrier profiles in metal-oxide-semiconductor field-effect transistor structures obtained with scanning spreading resistance microscopy and inverse modeling

De Wolf, PeterPeterDe WolfVandervorst, WilfriedWilfriedVandervorstSmith, H.H.SmithKhalil, N.N.Khalil2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4293Comparison of two-dimensional carrier profiles in metal-oxide-semiconductor field-effect transistor structures obtained with scanning spreading resistance microscopy and inverse modelingJournal article