Selective organic functionalization of polycrystalline silicon-germanium for bioMEMS applications

Lenci, SilviaSilviaLenciCaponigri, IreneIreneCaponigriLande, CaterinaCaterinaLandeNannini, AndreaAndreaNanniniPennelli, GiovanniGiovanniPennelliPieri, FrancescoFrancescoPieriSeveri, SimoneSimoneSeveriTedeschi, LorenaLorenaTedeschi2021-10-172021-10-1720091876-6196https://imec-publications.be/handle/20.500.12860/15687Selective organic functionalization of polycrystalline silicon-germanium for bioMEMS applicationsJournal article