Raghunathan, SudharSudharRaghunathanWood, ObertObertWoodMangat, PawitterPawitterMangatVerduijn, ErikErikVerduijnPhilipsen, VickyVickyPhilipsenHendrickx, EricEricHendrickxJonckheere, RikRikJonckheereGoldberg, KenKenGoldbergBenk, MarcusMarcusBenkKearney, PatPatKearneyLevinson, ZacharyZacharyLevinsonSmith, BruceBruceSmith2021-10-222021-10-2220141071-1023https://imec-publications.be/handle/20.500.12860/24413Characterization of telecentricity errors in high-numerical-aperture extreme ultraviolet mask imagesJournal articlehttp://scitation.aip.org/content/avs/journal/jvstb/32/6/10.1116/1.4901876