Poliakov, PavelPavelPoliakovBlomme, PieterPieterBlommeVaglio Pret, AlessandroAlessandroVaglio PretMiranda Corbalan, MiguelMiguelMiranda CorbalanGronheid, RoelRoelGronheidWiaux, VincentVincentWiauxVersluijs, JankoJankoVersluijsVerkest, DiederikDiederikVerkestVan Houdt, JanJanVan HoudtDehaene, WimWimDehaene2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21319Spacer-defined EUV lithography reducing variability of 12nm NAND Flash memoriesProceedings paper