Mapping nanometre-scale temperature gradients in patterned cobalt-nickel silicide films

Cannaerts, M.M.CannaertsChamirian, OxanaOxanaChamirianMaex, KarenKarenMaexVan Haesendonck, ChrisChrisVan Haesendonck2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6079Mapping nanometre-scale temperature gradients in patterned cobalt-nickel silicide filmsJournal article