Nucleation of ultra nanocrystalline diamond films using carbon diffusion through a Ti layer towards pretreated silicon and quartz substrates, as a seeding enhancement

Daenen, M.M.DaenenNesladek, MilosMilosNesladekPotocky, S.S.PotockyMortet, V.V.MortetD'Haen, JanJanD'HaenRosa, J.J.Rosa2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8743Nucleation of ultra nanocrystalline diamond films using carbon diffusion through a Ti layer towards pretreated silicon and quartz substrates, as a seeding enhancementMeeting abstract