Very high frequency PECVD SiNx:H for fast deposition of anti-reflection coating and passivation of mc-Si solar cells

Dekkers, HaroldHaroldDekkersDe Wolf, StefaanStefaanDe WolfAgostinelli, GuidoGuidoAgostinelliBeaucarne, GuyGuyBeaucarneStahr, F.F.StahrStephan, U.U.StephanKuske, J.J.KuskeSchade, K.K.Schade2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8826Very high frequency PECVD SiNx:H for fast deposition of anti-reflection coating and passivation of mc-Si solar cellsProceedings paper