Interface profiling to sub-nm precision using uleSIMS

Morris, RichardRichardMorrisHase, ThomasThomasHaseSanchez, AnaAnaSanchezRowlands, GeorgeGeorgeRowlands2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29024Interface profiling to sub-nm precision using uleSIMSMeeting abstracthttp://sims.confer.uj.edu.pl/resources/Book_of_Abstracts_A4_v1.pdf