Process Development and Characterization of Ru-based UBM for In Bumps Integration for Quantum Computing Applications

Le Tulzo, HaroldHaroldLe TulzoBijou, DianeDianeBijouSouza, ThereseThereseSouzaGallegos, AnthonyAnthonyGallegosThomas, CandiceCandiceThomasDeschaseaux, EdouardEdouardDeschaseauxFeautrier, CelineCelineFeautrierCharbonnier, JeanJeanCharbonnierGueugnot, AlainAlainGueugnotDerakhshandeh, JaberJaberDerakhshandehHussain, TassawarTassawarHussainDaviot, JeromeJeromeDaviot2025-07-312024-12-072025-07-312024979-8-3503-7599-20569-5503WOS:001260983500062https://imec-publications.be/handle/20.500.12860/44936Process Development and Characterization of Ru-based UBM for In Bumps Integration for Quantum Computing ApplicationsProceedings paper10.1109/ECTC51529.2024.00068979-8-3503-7598-5WOS:001260983500062WET ETCHPERIODATE