Selvaraja, ShankarShankarSelvarajaBogaerts, WimWimBogaertsDumon, PieterPieterDumonVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16194Amorphous silicon photonic crystals made with 193nm lithographyProceedings paper