Popovici, Mihaela IoanaMihaela IoanaPopoviciDelabie, AnneliesAnneliesDelabieVan Elshocht, SvenSvenVan ElshochtClima, SergiuSergiuClimaPourtois, GeoffreyGeoffreyPourtoisSwerts, JohanJohanSwertsNyns, LauraLauraNynsTomida, KazuyukiKazuyukiTomidaMenou, NicolasNicolasMenouWouters, DirkDirkWoutersOpsomer, KarlKarlOpsomerDetavernier, ChristopheChristopheDetavernierKittl, JorgeJorgeKittl2021-10-182021-10-1820090013-4651https://imec-publications.be/handle/20.500.12860/16043Growth and material characterization of hafnium titanates deposited by atomic layer depositionJournal articlehttp://scitation.aip.org/journals/doc/JESOAN-ft/vol_156/iss_10/G145_1.html