Le, Quoc ToanQuoc ToanLeKesters, ElsElsKestersHoflijk, IlseIlseHoflijkConard, ThierryThierryConardShen, M.M.ShenBraun, S.S.BraunBurk, Y.Y.BurkHolsteyns, FrankFrankHolsteyns2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26881Characterization of etch residues generated on damascene structuresProceedings paperhttp://www.scientific.net/SSP.255.227