Influence of the nonlinearity introduced by the Van der Waals force on the behaviour of NEM resonators

Zanaty, MohamedMohamedZanatyJansen, RoelofRoelofJansenRochus, VeroniqueVeroniqueRochusAbbas, MohamedMohamedAbbasWitvrouw, AnnAnnWitvrouwTilmans, HarrieHarrieTilmansRottenberg, XavierXavierRottenberg2021-10-202021-10-202012-09https://imec-publications.be/handle/20.500.12860/21908Influence of the nonlinearity introduced by the Van der Waals force on the behaviour of NEM resonatorsProceedings paperhttp://www.tu-ilmenau.de/fileadmin/media/mme2012/Proceedings/Session_D/D05_1661_MME2012_120730.pdf