De Schepper, PeterPeterDe SchepperHansen, TerjeTerjeHansenAltamirano Sanchez, EfrainEfrainAltamirano SanchezVaglio Pret, AlessandroAlessandroVaglio PretBoullart, WernerWernerBoullartDe Gendt, StefanStefanDe Gendt2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22217Line edge and width roughness smoothing by plasma treatmentProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1674528