Dynamics of the defects left by a residual droplet on photoresist-coated substrates

Belmiloud, NaserNaserBelmiloudTamaddon, Amir-HosseinAmir-HosseinTamaddonMertens, PaulPaulMertensStruyf, HerbertHerbertStruyf2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20347Dynamics of the defects left by a residual droplet on photoresist-coated substratesMeeting abstract