The influence of dopants on the leakage current in PZT thin-film ferroelectric capacitors

Wouters, D. J.D. J.WoutersWillems, GeertGeertWillemsGroeseneken, GuidoGuidoGroesenekenMaes, HermanHermanMaesBrooks, K.K.BrooksKlissurska, R.R.Klissurska2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/1028The influence of dopants on the leakage current in PZT thin-film ferroelectric capacitorsProceedings paper