Litho-process-litho for 2D 32nm hp LOGIC and DRAM double patterning

Wong, PatrickPatrickWongWiaux, VincentVincentWiauxVerhaegen, StafStafVerhaegenVandenbroeck, NadiaNadiaVandenbroeck2021-10-192021-10-192010https://imec-publications.be/handle/20.500.12860/18370Litho-process-litho for 2D 32nm hp LOGIC and DRAM double patterningProceedings paper