A simple model and simulation of complete suppression of boron out-diffusion in Si1-xGex by carbon insertion

Krishnasamy, RajendranRajendranKrishnasamySchoenmaker, WimWimSchoenmaker2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5600A simple model and simulation of complete suppression of boron out-diffusion in Si1-xGex by carbon insertionProceedings paper