Carbon-related defects in Si:C/silicon heterostructures assessed by deep-level transient spectroscopy

Simoen, EddyEddySimoenDhayalan, Sathish KumarSathish KumarDhayalanHikavyy, AndriyAndriyHikavyyLoo, RogerRogerLooRosseel, ErikErikRosseelVrielinck, HenkHenkVrielinckLauwaert, JohanJohanLauwaert2021-10-242021-10-2420172162-8769https://imec-publications.be/handle/20.500.12860/29438Carbon-related defects in Si:C/silicon heterostructures assessed by deep-level transient spectroscopyJournal articlehttp://jss.ecsdl.org/content/6/5/P284.abstract