Corrosion and inhibition of WNxCy barrier during chemical mechanical planarization

Ernur, DidemDidemErnurTerzieva, ValentinaValentinaTerzievaSchuhmacher, JorgJorgSchuhmacherSutcliffe, VictorVictorSutcliffeWhelan, CarolineCarolineWhelanMaex, KarenKarenMaex2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10435Corrosion and inhibition of WNxCy barrier during chemical mechanical planarizationJournal article