A monolithic low-power-consumption driver circuit based on a Dickson charge pump for MEMS actuator applications

Peng, HuiHuiPengDe Pauw, HerbertHerbertDe PauwBauwens, PieterPieterBauwensDoutreloigne, JanJanDoutreloigne2021-10-272021-10-2720190038-1101https://imec-publications.be/handle/20.500.12860/33768A monolithic low-power-consumption driver circuit based on a Dickson charge pump for MEMS actuator applicationsJournal articlehttps://doi.org/10.1016/j.sse.2019.107683