Mao, ShengpingShengpingMaoZhong, KuoKuoZhongRochus, VeroniqueVeroniqueRochusSeveri, SimoneSimoneSeveriNauwelaers, BartBartNauwelaersTilmans, HarrieHarrieTilmansRottenberg, XavierXavierRottenberg2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25607Capacitive micromachined ultrasonic transducers for acoustic manipulationProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7181010