Brijs, BertBertBrijsDeleu, JeroenJeroenDeleuBeyer, GeraldGeraldBeyerVandervorst, WilfriedWilfriedVandervorst2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3270Advanced capabilities and applications of a sputter-RBS systemProceedings paper