Using the AIMS 45-193i for hyper-NA imaging applications

De Bisschop, PeterPeterDe BisschopPhilipsen, VickyVickyPhilipsenBirkner, RobertRobertBirknerButtgereit, UweUweButtgereitRichter, RigoRigoRichterScherübl, ThomasThomasScherübl2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11943Using the AIMS 45-193i for hyper-NA imaging applicationsProceedings paper