Vapor phase thiol self-assembled monolayers for ALD blocking

Herregods, SebastiaanSebastiaanHerregodsLecordier, LaurentLaurentLecordierDelande, TinneTinneDelandeTokei, ZsoltZsoltTokeiStruyf, HerbertHerbertStruyfArmini, SilviaSilviaArmini2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30880Vapor phase thiol self-assembled monolayers for ALD blockingMeeting abstracthttp://mam2018.mdm.imm.cnr.it/MAM2018.pdf