Study of electrically active defects in epitaxial layers on silicon

Simoen, EddyEddySimoenDhayalan, Sathish KumarSathish KumarDhayalanJayachandran, SuseendranSuseendranJayachandranGupta, SomyaSomyaGuptaGencarelli, FedericaFedericaGencarelliHikavyy, AndriyAndriyHikavyyLoo, RogerRogerLooRosseel, ErikErikRosseelDelabie, AnneliesAnneliesDelabieCaymax, MattyMattyCaymaxLanger, RobertRobertLangerBarla, KathyKathyBarlaVrielinck, HenkHenkVrielinckLauwaert, JohanJohanLauwaert2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27314Study of electrically active defects in epitaxial layers on siliconProceedings paper