Vapour phase self-assembled monolayers for ALD blocking on 300 mm wafer scale

Herregods, SebastiaanSebastiaanHerregodsLaurent, LecordierLecordierLaurentVyas, ShashiShashiVyasChan, BTBTChanDelande, TinneTinneDelandeHetel, IulianIulianHetelTokei, ZsoltZsoltTokeiStruyf, HerbertHerbertStruyfArmini, SilviaSilviaArmini2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28492Vapour phase self-assembled monolayers for ALD blocking on 300 mm wafer scaleMeeting abstract