Tang, HongweiHongweiTangLin, DennisDennisLinSubhechha, SubhaliSubhaliSubhechhaChasin, AdrianAdrianChasinMatsubayashi, DaisukeDaisukeMatsubayashivan Setten, MichielMichielvan SettenWan, YiqunYiqunWanDekkers, HaroldHaroldDekkersLi, JieJieLiSubramanian, ShruthiShruthiSubramanianChen, ZhuoZhuoChenRassoul, NouredineNouredineRassoulJiang, YuchaoYuchaoJiangVan Houdt, JanJanVan HoudtAfanas'ev, ValeriValeriAfanas'evKar, Gouri SankarGouri SankarKarBelmonte, AttilioAttilioBelmonte2025-05-222025-05-222025-MAY0741-3106WOS:001482876000020https://imec-publications.be/handle/20.500.12860/45698The Impact of Process Steps on Nearly Ideal Subthreshold Slope in 300-mm Compatible InGaZnO TFTsJournal article10.1109/LED.2025.3549865WOS:001482876000020CELL