Conformal electroless deposition on monolayers for TSV applications

Cervati, MicheleMicheleCervatiCarnevali, GuidoGuidoCarnevaliArmini, SilviaSilviaArminiMagagnin, LucaLucaMagagnin2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22119Conformal electroless deposition on monolayers for TSV applicationsProceedings paperhttp://ma.ecsdl.org/content/MA2013-02/38/2366.abstract