Atomic layer deposition of strontium titanate films using Sr(tBu3Cp)2 and Ti(OMe)4

Popovici, Mihaela IoanaMihaela IoanaPopoviciVan Elshocht, SvenSvenVan ElshochtMenou, NicolasNicolasMenouSwerts, JohanJohanSwertsPierreux, DieterDieterPierreuxDelabie, AnneliesAnneliesDelabieBrijs, BertBertBrijsConard, ThierryThierryConardOpsomer, KarlKarlOpsomerMaes, JanJanMaesWouters, DirkDirkWoutersKittl, JorgeJorgeKittl2021-10-182021-10-1820100013-4651https://imec-publications.be/handle/20.500.12860/17830Atomic layer deposition of strontium titanate films using Sr(tBu3Cp)2 and Ti(OMe)4Journal articlehttp://scitation.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=JESOAN0001570000010000G1000001&idtype=cvips&prog=normal