Sardo, StefanoStefanoSardoPalombizio, AntonioAntonioPalombizioRedolfi, AugustoAugustoRedolfiMannarino, ManuelManuelMannarinoHaspeslagh, LucLucHaspeslagh2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/35898Effect of inductively coupled electro-magnetic field on bottom oxide etch in a high aspect ratio trenchProceedings paperhttps://doi.org/10.1149/09703.0003ecst