Connected component analysis of review-SEM images for sub-10nm node process verification

Halder, SandipSandipHalderLeray, PhilippePhilippeLeraySah, KaushikKaushikSahCross, AndrewAndrewCrossParisi, PaoloPaoloParisi2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28450Connected component analysis of review-SEM images for sub-10nm node process verificationProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2615869