Wu, Chien-chingChien-chingWuBender, MarkusMarkusBenderJonckheere, RikRikJonckheereScholze, FrankFrankScholzeBekman, HermanHermanBekmanvan Putten, MichelMichelvan Puttende Zanger, RoryRoryde ZangerEbeling, RobRobEbelingWesterhout, JeroenJeroenWesterhoutNicolai, KyriKyriNicolaivan Veldhoven, JacquelineJacquelinevan Veldhovende Rooij-Lohmann, VeroniqueVeroniquede Rooij-LohmannKievit, OlafOlafKievitDeutz, AlexAlexDeutz2021-10-272021-10-272019-05https://imec-publications.be/handle/20.500.12860/34455Proceedings paperhttps://doi.org/10.1117/12.2537734