Delabie, AnneliesAnneliesDelabieCaymax, MattyMattyCaymaxGroven, BenjaminBenjaminGrovenHeyne, MarkusMarkusHeyneHaesevoets, KarelKarelHaesevoetsMeersschaut, JohanJohanMeersschautNuytten, ThomasThomasNuyttenBender, HugoHugoBenderConard, ThierryThierryConardVerdonck, PatrickPatrickVerdonckVan Elshocht, SvenSvenVan ElshochtDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsBarla, KathyKathyBarlaRadu, IulianaIulianaRaduThean, AaronAaronThean2021-10-222021-10-2220151359-7345https://imec-publications.be/handle/20.500.12860/25179Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: Impact of reducing agentsJournal articlehttp://pubs.rsc.org/en/content/articlelanding/2015/cc/c5cc05272f#!divAbstract