Si trim applications: benefits and challenges

Kal, SubhadeepSubhadeepKalOniki, YusukeYusukeOnikiPereira, CherylCherylPereiraHolsteyns, FrankFrankHolsteynsChanemougame, DanielDanielChanemougameMosden, AelanAelanMosdenKumar, KaushikKaushikKumarBiolsi, PeterPeterBiolsiHurd, Trace Q.Trace Q.Hurd2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33237Si trim applications: benefits and challengesMeeting abstract