Gallium-doped SiGe and Ge via MO-RPCVD epitaxy

Margetis, JoeJoeMargetisPorret, ClémentClémentPorretKumar, RajRajKumarPetersen Barbosa Lima, LucasLucasPetersen Barbosa LimaKohen, DavidDavidKohenLoo, RogerRogerLooTolle, JohnJohnTolle2021-10-252021-10-252018-05https://imec-publications.be/handle/20.500.12860/31287Gallium-doped SiGe and Ge via MO-RPCVD epitaxyMeeting abstract