Characterization of the post dry etch cleaning of the silicon surface prior to silicon epitaxial growth

Kim, Young-ChangYoung-ChangKimCaymax, MattyMattyCaymaxBender, HugoHugoBenderVanhaelemeersch, SergeSergeVanhaelemeersch2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3558Characterization of the post dry etch cleaning of the silicon surface prior to silicon epitaxial growthProceedings paper