On the influence of the fitting algorithm on depth profiles reconstructed from AR-XPS data

Conard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorstMacak, KarolKarolMacakMishra, GautamGautamMishra2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16902On the influence of the fitting algorithm on depth profiles reconstructed from AR-XPS dataMeeting abstract