Veloso, AnabelaAnabelaVelosoMatagne, PhilippePhilippeMatagneJang, DoyoungDoyoungJangHuynh-Bao, TrongTrongHuynh-BaoVaisman Chasin, AdrianAdrianVaisman ChasinSimoen, EddyEddySimoenEneman, GeertGeertEnemanDe Keersgieter, AnAnDe KeersgieterMertens, HansHansMertensHoriguchi, NaotoNaotoHoriguchi2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/36234Gate-All-Around nanowire & nanosheet FETs for advanced, ultra-scaled technologies (Keynote)Proceedings paperhttps://doi.org/10.1149/09705.0003ecst