Low temperature pre-epi treatment: critical parameters to control interface contamination

Loo, RogerRogerLooHikavyy, AndriyAndriyHikavyyLeys, FrederikFrederikLeysWada, MasayukiMasayukiWadaSano, Ken-IchiKen-IchiSanoDe Vos, BrechtBrechtDe VosPacco, AntoineAntoinePaccoBargallo Gonzalez, MireiaMireiaBargallo GonzalezSimoen, EddyEddySimoenVerheyen, PeterPeterVerheyenVanherle, WendyWendyVanherleCaymax, MattyMattyCaymax2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14061Low temperature pre-epi treatment: critical parameters to control interface contaminationProceedings paper