Plasma enhanced CVD growth of Si nanowires with low melting point metal catalysts: an effective alternative to Au-mediated growth

Iacopi, FrancescaFrancescaIacopiVereecken, PhilippePhilippeVereeckenSchaekers, MarcMarcSchaekersCaymax, MattyMattyCaymaxMoelans, NeleNeleMoelansBlanpain, BartBartBlanpainRichard, OlivierOlivierRichardDetavernier, ChristopheChristopheDetavernierGriffiths, HefinHefinGriffiths2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12333Plasma enhanced CVD growth of Si nanowires with low melting point metal catalysts: an effective alternative to Au-mediated growthJournal article