Monolithic GaAs/Si V-groove depletion-type optical phase shifters integrated in a 300 mm Si photonics platform

Kim, YounghyunYounghyunKimYudistira, DiditDiditYudistiraKunert, BernardetteBernardetteKunertBaryshnikova, MarinaMarinaBaryshnikovaAlcotte, ReynaldReynaldAlcotteOzdemir, Cenk IbrahimCenk IbrahimOzdemirKim, SanghyeonSanghyeonKimLardenois, SebastienSebastienLardenoisVerheyen, PeterPeterVerheyenVan Campenhout, JorisJorisVan CampenhoutPantouvaki, MariannaMariannaPantouvaki2023-08-212023-06-202023-08-2120222327-9125WOS:000810502800022https://imec-publications.be/handle/20.500.12860/41833Monolithic GaAs/Si V-groove depletion-type optical phase shifters integrated in a 300 mm Si photonics platformJournal article10.1364/PRJ.451821WOS:000810502800022INPHYDROGENATIONMODULATORS