Nyns, LauraLauraNynsDelabie, AnneliesAnneliesDelabiePourtois, GeoffreyGeoffreyPourtoisVan Elshocht, SvenSvenVan ElshochtVinckier, ChrisChrisVinckierDe Gendt, StefanStefanDe Gendt2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14232Study of the surface reactions of ALD hafnium aluminatesMeeting abstract